M. Sc. Mareike Benedde

Konferenz

• Nicolaus, M.; Benedde, M.; Walther, R.; Möhwald, K.; Maier, H. J. (2022): Yttria coatings as wear protection layer in the semiconductor industry,  DVS-Berichte, Band 380, DVS Media GmbH, Düsseldorf, S. 939-944