Study of the electron-temperature and -density distribution in the silane-doped thermal plasma on the basis of optical emission spectroscopy
| Categories |
Konferenz |
| Year | 2022 |
| Authors | Hassel, T.; Bongartz, B.; Hao, C.; Viebranz, V. F. |
| Published in | MSE 2022, Darmstadt, 27.09.2022-29.09.2022 |
