Institute of Materials Science Research Publications
Gas Phase Reaction of Silane with Water at Different Temperatures and Supported by Plasma

Gas Phase Reaction of Silane with Water at Different Temperatures and Supported by Plasma

Categories Journal paper, peer-reviewed
Year 2023
Authors Szafarska, M., Olszok, V., Holländer, U., Gustus, R., Weber, A. P., Maus-Friedrichs, W.
Published in ACS Omega 8, pp. 8388–8396
DOI 10.1021/acsomega.2c07209