Influence of an Argon/Silane Atmosphere on the Temperature of a Thermal Plasma
| Categories |
Journals |
| Year | 2026 |
| Authors | Kreie, L.; Kramer, D.; Scheithauer, T.; Maier, H. J.; Hassel, T. |
| Published in | Advanced Engineering Materials, 2026, e202502558 |
| DOI | 10.1002/adem.202502558 |
