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FE-REM-FIB-Zweistrahlsystem Zeiss AURIGA
- FE-REM, Auflösung 1,2 nm, Strahlstrom max. 100 nA
- Focused Ion Beam FIB: Ga-Ionen, Auflösung 2,5 nm
- Gasinjektionssystem GIS 5-fach (Pt, C, W,...)
- Charge Compensation
- Mikromanipulator, In-situ-Plasmacleaner
- Detektoren: SESI, 4Q-BSD, InLens SE, InLens EsB, STEM
- Analytik: EDX, EBSD (Oxford)
- 3D-Analytik
- ATLAS-3D: FIB-Tomographie, Nano-Patterning
- 3D-Visualisierungs-Software ORS visual SI
ANSPRECHPARTNER:
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Dr.-Ing. Torsten Heidenblut
Leitung
Telefon
Fax
E-Mail
Adresse
An der Universität 2
30823 Garbsen
30823 Garbsen
Gebäude
Raum
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Dr.-Ing. Torsten Heidenblut
Leitung