Institute for Material Science Research Publikationen
CrN/AlN nanolaminates: Architecture, residual stresses, and cracking behavior

CrN/AlN nanolaminates: Architecture, residual stresses, and cracking behavior

Categories Zeitschriften/Aufsätze
Year 2022
Authors Bobzin, K.; Brögelmann, T.; Kruppe, N. C.; Maier, H. J.; Heidenblut, T.; Besserer, H.-B.; Kahra, C.
Published in Journal of Vacuum Science & Technology A 40, 2022 (1), 13414
DOI 10.1116/6.0001462