CrN/AlN nanolaminates: Architecture, residual stresses, and cracking behavior
| Categories |
Zeitschriften/Aufsätze |
| Year | 2022 |
| Authors | Bobzin, K.; Brögelmann, T.; Kruppe, N. C.; Maier, H. J.; Heidenblut, T.; Besserer, H.-B.; Kahra, C. |
| Published in | Journal of Vacuum Science & Technology A 40, 2022 (1), 13414 |
| DOI | 10.1116/6.0001462 |
