Crystallographic Structure Analysis of a Ti-Ta Thin Film Materials Library Fabricated by Combinatorial Magnetron Sputtering
Categories |
Zeitschriften/Aufsätze |
Year | 2018 |
Authors | Kadletz, P. M.; Motemani, Y.; Iannotta, J.; Salomon, S.; Khare, C.; Grossmann, L.; Maier, H. J.; Ludwig, A.; Schmahl, W. W. |
Published in | ACS combinatorial science 20, 2018 (3), 137-150 |
DOI | 10.1021/acscombsci.7b00135 |