Institute for Material Science Research Publications
Crystallographic Structure Analysis of a Ti-Ta Thin Film Materials Library Fabricated by Combinatorial Magnetron Sputtering

Crystallographic Structure Analysis of a Ti-Ta Thin Film Materials Library Fabricated by Combinatorial Magnetron Sputtering

Categories Zeitschriften/Aufsätze
Year 2018
Authors Kadletz, P. M.; Motemani, Y.; Iannotta, J.; Salomon, S.; Khare, C.; Grossmann, L.; Maier, H. J.; Ludwig, A.; Schmahl, W. W.
Published in ACS combinatorial science 20, 2018 (3), 137-150
DOI 10.1021/acscombsci.7b00135