Large-chamber scanning electron microscope (GK-SEM)

The Institute of Materials Science has a large-chamber scanning electron microscope at its disposal, with which even large components can be examined under an electron microscope without having to separate relevant areas from the component. This is particularly advantageous when examining fractures, as there is no need for separate sample preparation. The beam generation and the detectors for recording the measurement signals correspond to those in conventional electron microscopes, which ensures a comparable analysis quality.

Technical Data

Manufacturer	VisiTec / Ellcie
Type	Mira VP
Detectors	QBSD, SE, VPSE, EDX
Contrast types	Element contrast, topography, element analysis/mapping
resolution	20 nm
Sample dimensions	Diameter: 700 mm, height: 600 mm
Operating modes	Diameter: 700 mm, height: 600 mm