Yttria coatings as wear protection layer in the semiconductor industry
| Categories |
Konferenz |
| Year | 2022 |
| Authors | Nicolaus, M.; Benedde, M.; Walther, R.; Möhwald, K.; Maier, H. J. |
| Published in | DVS-Berichte, Band 380, DVS Media GmbH, Düsseldorf, S. 939-944 |
