FE-SEM-FIB Dual System Zeiss AURIGA
- FE-REM, resolution 1.2 nm, beam current max. 100 nA
- Focused Ion Beam FIB: Ga-ions, resolution 2.5 nm
- Gas injection system GIS 5-fold (Pt, C, W,..)
- Charge Compensation
- Micromanipulator, in situ plasma cleaner
- Detectors: SESI, 4Q-BSD, InLens SE, InLens EsB, STEM
- Analytics: EDX, EBSD (Oxford)
- 3D analytics
- ATLAS-3D: FIB tomography, nano-patterning
- 3D visualization software ORS visual SI
CONTACT PERSON:
Dr.-Ing. Torsten Heidenblut
Management
Phone
Fax
Address
An der Universität 2
30823 Garbsen
30823 Garbsen
Building
Room
Dr.-Ing. Torsten Heidenblut
Management
